Hirata 晶圆传送机器人-真空型 Vacuum Type Robot
具備高潔淨度、高精度、高速生產性晶圓傳送機器人-真空型
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产品特色
- Flexible combination of arm length, arm type develops various robot specifications to satisfy your request.
- High performance ferromagnetic fluid unit provides the lowest leakage rate.
- Airtight ferromagnetic fluid seals and mesh filter realize total particle-free condition.
- New encoder adopted to eliminate encoder data backup battery.
- Transferring with high repeatability and high speed makesultimate throughput performance.
产品信息
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原厂名称
平田 -
制程名称
WLCSP/Ceramic e-WLB(Fan out)/Flip Chip/Wafer Bumping -
英文名称
Vacuum Type Robot -
产品细目
真空型晶圆传送机器人
