Hirata 自动晶圆分捡机 Wafer Sorter
具备高洁净度、高效能传送、可弹性化满足各式需求的晶圆分捡机: 无限自由系列
1
2
产品特色
- SEMI Software Standard: Supports GEM300.
- High Throughput: Smooth and High Speed wafer handling with AC servo system and control.
- Strongly-built slider: Robust rack & pinion ensures quiet driving and lubrication-free.
- Meets Customer's Requirement with Various Options
- Particle Free: Proven Clean FOUP Opener, Smooth down air flow Enclosure & High Clean Robot.
产品信息
-
原厂名称
平田 -
制程名称
WLCSP/Ceramic e-WLB(Fan out)/Flip Chip/Wafer Bumping -
英文名称
Wafer Sorter -
产品细目
自动晶圆分捡机
